In this particular paper, The brand new lapping slurry and sprucing slurry are introduced. Along with the deliquescence diploma of CLBO is fallen to least expensive. A brand new Doing work technological know-how can also be adopted. Right after tough sharpening, the concentration of ultra-precision polishing slurry is improved properly. So does the ultra-precision polishing pace, and also the wiping speed is faster than the deliquescence pace. The CLBO crystal floor roughness can obtain 1nm and keep the area high quality well. Entry by means of your institution

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We summarized The existing growth status from the higher-electrical power DUV laser both within the wavelength of FHG with the 1-μm laser and at 193 nm. The new enhancement with the sound-point out/fiber laser, together with the nonlinear optical crystals, prompts not simply the typical ability but will also the beam high quality (coherence) of your DUV lasers to an unprecedented amount.

全固态紫外激光器以其体积小、寿命长、效率高、光束质量好、调谐范围宽、谱线窄等优点，广泛应用于机械探伤、光刻、微加工和医学等领域，等，利用大功率近红外相干光源作为基于非线性调谐技术的基频源，通过多级变频产生紫外相干辐射被认为是发展紫外相干光源的重要途径。紫外相干光源的关键问题是研制紫外波段的非线性光学变频晶体。非线性光学晶体是实现频率变换的条件之一，因此对非线性光学晶体的生长、尺寸、损伤电阻、转换效率和允许的参数范围提出了越来越高的要求。

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A result of the thermal lens influence from the reliable-state lasers, In case the heating management is inadequate, It's not necessarily effortless to acquire the sound-point out laser using a superior electricity along with a large beam quality concurrently. Not long ago, with the event of The skinny disk laser and single-crystal fiber (SCF) laser, a large-electric power laser at the elemental wavelength (one μm) had been understood with a great beam high quality In spite of a TEM00 method beam [four,24], which might be superior candidates for the basic of your DUV laser technology. An additional candidate for the fundamental will be the higher-energy fiber laser which could be realized by coherent beam combination with M2 worth lower than one.

On the other facet, the ability scaling from the NIR laser is another factor to boost the ordinary energy in the 193-nm DUV laser. Due to the not enough the high-ability amplification solution on the NIR laser (for example at 1553 nm), nonlinear frequency processes including optical parameter oscillation (OPO) could possibly be placed on build a wavelength converter by shifting the wavelength from 1 μm to the desired wavelength along with acquiring relative increased electric power [21]. Not too long ago, a diamond Raman laser confirmed its potential in accomplishing a high power as well as a significant conversion performance at the 1st Stokes from the 1-μm laser [22,23], which implies the possibility to be used inside the 193-nm DUV laser era thanks to its high Raman acquire and large frequency change.

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